Materials Tester

Universal Nano + Mikro Materials Tester UNMT-1

Nano- and micromechanical characterization of surfaces plays a decisive role in many issues of triboanalysis for thin films, coatings, MEMS, NEMS, semiconductor wafers and devices, systems of data storage, biomedical components, polymers, elastomers, metals and alloys, ceramics, etc.


Nanoindentation Module NH-3

With the progress of nanotechnology and development of thin films (solar cells, CVD, PVD, DLC, MEMS, etc. nanomechanical tests have become standard. They improve on the traditional tests by being done at low loads and shallow depths with very sharp tips, high spatial resolution, and in-situ precise load-displacement data.

Nanoindentation – single/multiple indents per the ISO 14577 to measure hardness, Young’s modulus, tensile and von Mises stresses, contact stiffness, etc. of thin films, thick coatings and bulk materials.

Nanoscratch at constant, increasable and user-defined programmable load to evaluate scratch-hardness and scratch-adhesion of thin films, thick coatings and bulk materials.

Dynamic indentation (with vibrating tip) to measure depth-dependant loss and storage moduli.

Micromodule MH-2

Micromechanical tests have been used to measure mechanical properties of coatings or bulk materials. Instrumented micromechanical test improves on the traditional ones by providing in-situ load-displacement data and by using advanced signals, like acoustic emission, ECR, friction, etc. for more comprehensive characterization.

Instrumented microindentation – per the ISO 14577 on macroscale (for loads greater than 2 N) to calculate hardness, Young’s modulus, tensile and von Mises stresses, contact stiffness, etc. of coatings and bulk materials.

Traditional Vickers and Knoop microhardness per the ASTM E384-99.

Microscratch at constant, increasable and user-defined programmable load to evaluate scratch-hardness and scratch-adhesion of coatings.

Features of NH-3:

  • Electromagnetic force transducer
  • 3-plate capacitance sensor to measure displacement with ultrahigh accuracy
  • Berkovich, spherical, cube corner, etc. indenter tip geometries
  • Mapping of unlimited number of indents
  • Inline imaging options (AFM recommended)
  • High throughput and repeatability
  • Optional advanced in-situ sensors
  • Thermal and acoustic enclosure, vibration isolation table
  • ASTM, DIN and ISO compliant

Features of MH-2:

  • Electromagnetic force transducer
  • 3-plate capacitance sensor to measure displacement with ultrahigh accuracy
  • Vickers, Rockwell, Knoop, spherical, etc. indenter tip geometries
  • Mapping of unlimited number of indents
  • Inline imaging options (3D profiler recommended)
  • High throughput and repeatability
  • Optional advanced in-situ sensors
  • User definable analysis algorithm or models to calculate materials properties
  • ASTM, DIN and ISO compliant

Nanotribology Options

  • Easily interchangeable Linear and Rotary drives.
  • Temperature, humidity and gases options.
  • Wide range of speeds from ultra high to ultra low.
  • Ultra Low loads - Precision servo-control of loads, speeds, and positions for uniquely reproducible test data.
  • Patented sensors for simultaneous measurements of forces in X, Y and Z axes.
  • Friction, wear, stiction, stick-slip.

Advanced in-situ Sensors

AE - The high-frequency acoustic emission sensor detects the crack initiation and propagation in the hard and metallic coatings.

COF - When the coating breaks or when the indenter digs deep in the coating the friction changes. Coefficient of friction (static and dynamic) is automatically calculated.

ECR - The electrical contact resistance changes as a conductive tip digs deeper into the coating.

In-line Imaging

Advanced in-situ and in - lineimaging options. The images a regenerated automatically after the test without removing the sample from the tool.

AFM-Scanning ranges from 50 x 50 x 3 μm up to 180 x 180 x 14 μm

3D profilometer-Scanning ranges from 10 x 10 x 10 μm up to 500 x 500 x 500 μm.

High Magnification Microscope - With revolving head and multiple objectives.

Medium Magnification Microscope - For in-situ imaging and precise positioning; both top and side views.

Instrument Highlights

  • Modular design enables micro and nano modules to be interchangeable in less than 5 minutes.
  • Combination of electromagnetic force transducer and 3-plate capacitance sensor to provide industry leading stability and accuracy.
  • Multiple in-situ sensors (acoustic, electrical resistance, friction, temperature, humidity, velocities, etc.).
  • Proprietary advanced servo control of loads, speeds and positions.
  • In-line nano and micro imaging without removing the sample.
  • Fast effective real-time data monitoring, recording and a powerful statistical analysis software.
  • Optional environmental chambers.
  • Automated handling of multiple small and large samples.

Three Head Positions

Left
Mechanical (easily interchangeable micro and nano heads).
Middle
Revolving-head microscope (up to 4 easily interchangeable objectives).
Right
Imaging (easily interchangeable AFM and 3-D profiler).

Standards

ASTM E2546
New standard practice for nano indentation
ISO 14577
Instrumented indentation for hardness
ASTM C1624
Standard method for adhesion and mechanical failure of ceramic coatings
ISO 20502
Standard test for fine ceramic scratching
ASTM D7187
Scratch behavior of paints

and many more

Nano+Micro Technical Specifications

ParameterNano (NH-3)Micro (MH-2)
Load Range
- Resolution
Friction Range
- Resolution
Depth Range
- Resolution
XY Stage Range
- Resolution
Optical Microscope
Scratch Speed
- Length
- Depth
up to 500 mN
0.03 μN
up to100 mN
3 μN
200 μm
0.02 nm
120 x 120 mm
0.1 μm
from 10x to 2500x
1 μm/s to 10 mm/s
1 μm to 100 mm
1 nm to 200 μm
up to 20 N
0.1 mN
up to 10 N
0.2 mN
500 μm
0.1 nm
120 x 120 mm
0.1 μm
from 10x to 2500x
1 μm/s to 10 mm/s
1 μm to 100 mm
10 nm to 500 μm

Atomic Force Microscope (AFM) Module

Nano-Imaging

Nano-Measurements

Nano-Mapping

Topography

Nano-Roughness

Lateral Nano-Friction

Magnetic Properties

Wear / Scratch / Indent

Pull-Up Nano-Adhesion

Applications

  • Nano-imaging in mechanical and tribological testing without sample removal:
    • comparison of surface topography before / after and periodically during tests
    • periodic nano-imaging (AFM) and continuous micro-imaging ( OM ) of wear, scratch, crack, indent development, growth and propagation
    • lateral and adhesion mapping of test surface before / after and periodically during tests
  • Force measurements in mechanical and tribological testing without sample removal:
    • comparison of AFM nano-friction and UMT micro / macro - friction on surfaces
    • comparison of AFM nano-adhesion and UMT micro / macro - adhesion on surfaces

Nano Defectoscopy

  • auto-positioning on surface defects with known coordinates (X&Y or R&Θ), easily downloadable from optical or stylus macro-characterization instruments
  • rotary or linear sample table with sub-micron positioning resolution
  • failure analysis and quality control on samples up to 6”, optional 8”:
  • optical displays (LCD, LED, Plasma)
  • optical discs (DVD, CD, PD)
  • magnetic discs and head wafers
  • semiconductor and MEMS wafers

Technical Highlights

  • Commercial advanced atomic force microscope (AFM)
    Functions:
    • atomic force microscopy
    • phase imaging
    • magnetic force microscopy
    • lateral force mapping
    • adhesion force mapping
    • contact and semi/non-contact
    Scanning ranges:
    • 50×50x3 µm
    • 100×100x9 µm
    • 180×180x14 µm
    Resolution: 0.1 nm
  • Digital high-resolution wide-field-of-view optical microscope (OM) and a color CCD camera
    • continuous video
    • still micro-images
    • micro-positioning of AFM tip
  • Full mechanical and electrical integration into UNMT

Micro-Scratch Module

is destined for quantitative coating adhesion, scratch-resistance and scratch-hardness investigations and performs the following tests:
  • scratch-resistance
  • scratch-adhesion
  • scratch-hardness
  • scratch-toughness.
This module is widely used for the tests of optical coatings, semiconductor layers, flat panel LCD and plasma displays, wear-resistant coatings, corrosion-resistant coatings, decorative coatings and paints, data storage media overcoats, cutting tools coatings, automotive varnishes and finishes, pharmacy tablets and pills, etc.

Technical Highlights

  • Loading system: uniquely precise active-feedback servo-control for normal force, maintained either constant or increasing (in steps or gradually)

  • Scratch tools:
    • Rockwell and Vickers indenters
    • Diamond stylus 2-200 µm
    • Tungsten carbide, sapphire, steel balls 1.5-25 mm
    • Steel needles 0.1-1 mm
    • Patented micro-blades 0.4-1.0 mm
  • Maximum normal load: 200N
  • Normal load minimum resolution: 1µN
  • Multiple sensors:
    • Acoustic emission: high frequency up to 5.5MHz
    • Friction coefficient
    • Electrical contact or surface resistance: mOhms to MOhms
    • Capacitance for depth monitoring
    • Digital optical microscope for micro-imaging: 550x
    • CCD Camera: video and still images
    • Atomic force microscope for nano-imaging: contact and semi/non-contact modes
  • Sample shapes: any, including irregular
  • Sample sizes: from microns up to 150 mm
  • Sample stages: linear or rotary
  • Position resolution: < 1µ
  • Multi-scratch: automatic mode

Applications

Wear-resistant coatings
TiN, TiC, DLC, WC
Cutting tools
Semiconductors
Low K materials
Interconnects

Passivation layers
Biomedical
Tablets and pills
Implants and Tissues
Thin films
CVD/PVD coatings
Solar cells, MEMS, fuel cells
Optical components
Window Glass

Lenses
Optical coatings
Decorative coatings
Hard disk industry
Disk and head overcoats
DLC coatings
Automotive & Aerospace
Paints and intermediate layers

Windows
Engine components